We present results of carbon coatings on metal substrates in cylindricalhollow cathode (CHC) direct current magnetron sputtering. This is a newtechnique of making amorphous carbon film in CHC magnetron sputtering fromregenerative sooting discharge. The carbon films are deposited on Cu and Alsubstrates in Ne atmosphere and compared with the films of carbon soot on thesame materials produced from conventional arc discharge between graphiteelectrodes at 80 Angstrom in He background. The films are characterized usingonline emission, Raman, and Fourier transform infrared spectroscopy; X-raydiffraction (XRD) and Scanning electron microscopy (SEM). Raman spectroscopyreveals the existence of graphite and diamond like structures from arcdischarge while in CHC magnetron sputtering, graphite like structures aredominant. XRD pattern from arc discharge show precipitates of Al4C3 ofrhombohedral and hexagonal types in nanometer ranges for aluminum sample andprobable formation of diamond and hexagonal carbon in copper whilst inmagnetron sputtering we get amorphous carbon films. SEM images of surface showcollection of loose agglomerates of carbon particles in arc discharge whereasfor magnetron sputtering structures are regular with smooth edges and finegrains.
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